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一种石墨烯纳晶碳膜接触电特性的测试装置及方法

成果领域:

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成果归属企业: 深圳大学

成果鉴定时间:

成果介绍

本发明公开一种柔性温度传感器及其制备方法。所述柔性温度传感器包括：柔性衬底、位于所述柔性衬底上的电极，所述电极包括源极、漏极和栅极，所述源极和漏极构成叉指型电极，还包括复合薄膜，所述复合薄膜由半导体层和栅介电层构成，所述半导体层覆盖于所述叉指型电极的沟道上，所述栅介电层覆盖于所述半导体层与所述栅极上，所述半导体层与所述栅介电层形成互渗结构。本发明半导体层与栅介电层形成互渗结构，从而形成柔性的复合薄膜，实现全柔性的传感器结构。半导体层与栅介电层部分形成的互渗结构，将大大提高两者的接触面积，从而增加栅介电层的平板电容大小，利用平板电容随温度变化并结合晶体管放大作用，最终实现高灵敏度的温度探测。

成果应用案例介绍

测量实验>传感器>柔性温度传感器

联系方式

电话/微信: 13822630888

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